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Title:
MICROMACHINE
Document Type and Number:
Japanese Patent JP2005081524
Kind Code:
A
Abstract:

To provide an MEMS structure capable of improving an SN ratio by reducing parasitic capacitance between electrodes even when a signal transmission system with the usage of a high order mode of a beam type vibrator is adopted, and capable of coping with a high frequency range such as a GHz range.

This micromachine (MEMS) is constituted of the beam type vibrator 1 as a movable structure to which a direct current is applied, an input electrode 2 for exciting vibration to the vibrator 1, and an output electrode 3 for detecting vibration excited by the vibrator 1, and provided with a hierarchical structure wherein the vibrator 1 is fastened between the input electrode 2 and the output electrode 3 so that they are overlapped.


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Inventors:
MATSUHISA KAZUHIRO
KINOSHITA TAKASHI
NANBADA KOJI
Application Number:
JP2003319253A
Publication Date:
March 31, 2005
Filing Date:
September 11, 2003
Export Citation:
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Assignee:
SONY CORP
International Classes:
B81B3/00; H03H9/24; (IPC1-7): B81B3/00; H03H9/24
Attorney, Agent or Firm:
Funabashi Kuninori



 
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