To solve the prior art problem wherein the non-linearity of an output characteristic curve of a pressure sensor cannot be removed by a conventional method of determining the place(s) of one or more diaphragm compensation resistor(s).
The micromechanical pressure sensor device has a frame at least partially formed of a semiconductor material, a diaphragm held by the frame, and at least one measurement resistor provided in a first place in or on the diaphragm. The resistance value of the measurement resistor depends on mechanical pressure inducing the pressure in the diaphragm. The device has at least one compensation resistor provided in a second place in or on the diaphragm. The resistance value of the measurement resistor depends on a mechanical pressure inducing the pressure in the diaphragm. The resistance value in the first place is changed by a first primary component and a first secondary component depending on pressure. The resistance value in the second place approximately has no primary component, and is changed by a second secondary component proportional to the first secondary component and depending on pressure.
Einzel Felix-Reinhard
Reinhard Einsel