Title:
微小粒子配列用マスク
Document Type and Number:
Japanese Patent JP7201461
Kind Code:
B2
Abstract:
To prevent defects in microparticles from occurring in a case of arraying the microparticles having a diameter of less than or equal to 50 μm on a base material. Provided is a microparticle arraying mask for arraying microparticles having a diameter of less than or equal to 50 μm on a base material. The microparticle arraying mask has through-holes into which the microparticles are inserted. An opening plane of the through-holes on a microparticle supply side has an area smaller than an area of an opening plane of the through-holes on a microparticle discharge side. In a case of assuming that a direction from the opening plane on the microparticle supply side to the opening plane on the microparticle discharge side is a positive direction of a z-axis, and a sectional area of the through-holes vertical to the z-axis is A,dA(z)/dz>0 holds in a whole region in the through-holes along the z-axis, andExpression (1) below is satisfied:0.4≤t/d≤1.0 (1).
Inventors:
Akihiro Shibata
Masahiro Nishimoto
Yusuke Tanaka
Hirokazu Odagiri
Katsuhiro Doi
Masahiro Nishimoto
Yusuke Tanaka
Hirokazu Odagiri
Katsuhiro Doi
Application Number:
JP2019014278A
Publication Date:
January 10, 2023
Filing Date:
January 30, 2019
Export Citation:
Assignee:
Dexerials Co., Ltd.
International Classes:
H01L21/60; H05K3/34
Domestic Patent References:
| JP2004327536A | ||||
| JP2004253770A | ||||
| JP2005166893A | ||||
| JP2006073999A |
Attorney, Agent or Firm:
Aomi International Patent Office
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