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Title:
MICROPARTICLE DETECTION SYSTEM
Document Type and Number:
Japanese Patent JPH06242015
Kind Code:
A
Abstract:

PURPOSE: To provide a microparticle detection system for detecting a microparticle in a short time.

CONSTITUTION: The microparticle detection system comprises a scattering light detecting optical system 4 for irradiating the surface 10 of an object 9 with a plurality of laser beams and detecting the light Ls scattered from a microparticle adhered to the surface 10, a scan mechanism section 2 for relatively displacing the object 9 and the optical system 4 and scanning the surface 10 by means of the laser beam, and a data processing section 3 for processing data detected by the optical system 4.


Inventors:
SASAKI KENJI
Application Number:
JP3323593A
Publication Date:
September 02, 1994
Filing Date:
February 23, 1993
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G01N15/00; G01N15/10; G01N21/47; G01N21/88; G01N21/94; G01N21/956; (IPC1-7): G01N21/88; G01N15/00; G01N15/10; G01N21/47
Attorney, Agent or Firm:
Takehiko Suzue