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Patent Searching and Data


Title:
MICROSCOPE EQUIPPED WITH FOCUS DETECTOR AND DISPLACEMENT MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH1123953
Kind Code:
A
Abstract:

To provide a microscope equipped with a focus detecting means whose focusing detectable range is wide and where the shape of a focus error signal is symmetric on the positive side and the negative side around a focal position as the center.

In this microscope equipped with a differential beam size system focus detecting means, a 1st detection part 18 of the focus detecting means is arranged at a position separate from a condensing optical system 16 by a distance L1 from a focal point 20 of the optical system 16 and a 2nd detection part 19 is arranged at a position near to the optical system 16 by a distance L2 from a focal point 21 of the optical system 16. At this time, the L1 and the L2 are set to be L1≠L2 by coinciding with the asymmetric displacement of the converging point of a luminous flux by the optical system 16.


Inventors:
SHIONOYA TAKASHI
Application Number:
JP17975997A
Publication Date:
January 29, 1999
Filing Date:
July 04, 1997
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01B11/00; G02B7/28; G02B21/00; G03B13/36; (IPC1-7): G02B7/28; G01B11/00; G02B21/00; G03B13/36
Attorney, Agent or Firm:
Sanshin Iwao (1 person outside)