PURPOSE: To confirm an imprinting range in the midst of observing a sample surface and to photograph an image in the imprinting range without specially performing switching operation.

CONSTITUTION: A luminous flux from an object surface 0 passes through a 1st objective lens 1 and a 2nd objective lens 2, etc., and forms a primary image on an intermediate image surface I1. The luminous flux from the intermediate image surface I1 is divided to the luminous flux for an observation system and the luminous flux for photographing by an optical path division prism P1. The luminous flux for photographing passes through an image-formation lens 3 and forms the image of the object surface O again on a film surface I2, and the luminous flux for the observation system is synthesized with the projected luminous flux of a reticle 6 from a reticle optical system 10 in an optical path coupling prism P2, then the image of the object surface O and the image of the reticle 6 showing the imprinting range of a photograph are superposed and formed on an observation surface I3.