Title:
Mobile device, object processing device, exposure device, device manufacturing method, flat panel display manufacturing method, object exchange method, and exposure method
Document Type and Number:
Japanese Patent JP6292417
Kind Code:
B2
Abstract:
On a +X side of a first air floating unit which supports a substrate subject to carry-out, a second air floating unit which supports a substrate subject to carry-in is placed, and a third air floating unit is placed tilted in a θy direction below the second air floating unit. After the first air floating unit has been tilted in the θy direction and the substrate has been carried from above the first air floating unit onto the third air floating unit, the first air floating unit is made horizontal and another substrate is carried from above the second air floating unit onto the first air floating unit. Specifically, a carry-in path and a carry-out path of the substrate with respect to the first air floating unit are different. Accordingly, exchange of the substrate above the first air floating unit can be performed quickly.
Inventors:
Yasuo Aoki
Application Number:
JP2016076255A
Publication Date:
March 14, 2018
Filing Date:
April 06, 2016
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/677; B65G49/06; G03F7/20
Domestic Patent References:
| JP200853331A | ||||
| JP201054849A |
Attorney, Agent or Firm:
Atsushi Tateishi
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