Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MOLD FOR TRANSFERRING MINUTE PATTERN, METHOD FOR PRODUCING THE MOLD AND TRANSFER METHOD
Document Type and Number:
Japanese Patent JP2010058316
Kind Code:
A
Abstract:

To provide a mold for transferring a minute pattern, which can prevent the generation of such a phenomenon that a minute pattern to be formed on one surface of the mold is not transferred to an article to be molded.

The mold 20 for transferring the minute pattern is provided, as one integrated body, with: a mold 21 having one surface 21a, on which the minute pattern P to be transferred to the article 11 to be molded is formed, and the other flat surface 21b on the opposite side of the one surface 21a; and a warp correction plate 22 which is stuck onto the other surface 21b of the mold 21 in heated states and then cooled, shrunken and bent together with the mold 21 in order to beforehand impart the second warp of the direction countervailing against the first warp of the mold 21 to be generated by the reaction force to be received from the article 11 to be molded when the minute pattern P is transferred to the article 11 to be molded.


Inventors:
FUJIWARA SHIGERU
KOKUBO MITSUNORI
SUGIURA HIROYOSHI
ITANI SHINYA
Application Number:
JP2008224733A
Publication Date:
March 18, 2010
Filing Date:
September 02, 2008
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOSHIBA MACHINE CO LTD
International Classes:
B29C59/02; B29C33/38; H01L21/027
Domestic Patent References:
JPH02113456A1990-04-25
JP2008012861A2008-01-24
JP2001236697A2001-08-31
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu