MONOMOLECULAR FILM OF COPOLYMER OR LAMINATED FILM THEREFROM AND PROCESS FOR PRODUCING THE SAME

Title:

MONOMOLECULAR FILM OF COPOLYMER OR LAMINATED FILM THEREFROM AND PROCESS FOR PRODUCING THE SAME

Document Type and Number:

Japanese Patent JP2009114409

Kind Code:

A

Abstract:

To provide a monomolecular film or a laminated film therefrom having a plurality of monomolecular films that is useful for a resist material or the like.

The monomolecular film or a laminated film therefrom is produced by coating a substrate with a monomolecular film of a copolymer of an acrylic- or styrenic addition-polymerizable monomer comprising a silsesquioxane derivative and an addition polymerizable monomer represented by formula (B) (wherein Rb denotes hydrogen or a methyl: Z2 is -NH-; and n is an integer of 2-20).

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Inventors:

MIYASHITA TOKUJI
MITSUISHI KATAYA
KIM YEJI
MITANI SEIJU

Application Number:

JP2007292008A

Publication Date:

May 28, 2009

Filing Date:

November 09, 2007

Export Citation:

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Assignee:

CHISSO CORP
UNIV TOHOKU

International Classes:

C08F230/08; B05D1/20; B05D7/24; C08F220/56; C08J5/18; G03F7/075; H01L21/027

Attorney, Agent or Firm:

Yoshiyuki Kawaguchi
Hidemi Matsukura
Tsutomu Toyama
Shinichi Sanuki
Takeshi Niwa

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