載置台 - 東京エレクトロン株式会社

Title:

載置台

Document Type and Number:

Japanese Patent JP5479180

Kind Code:

B2

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Inventors:

Ryu Nonaka

Application Number:

JP2010072665A

Publication Date:

April 23, 2014

Filing Date:

March 26, 2010

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/683; H01L21/205; H01L21/3065; H01L21/31

Domestic Patent References:

Attorney, Agent or Firm:

Another role Shigehisa
Satoshi Muramatsu

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