Title:
MOVING STAGE DEVICE
Document Type and Number:
Japanese Patent JP3428808
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To perform precise position measurement and positioning by a laser interferometer by providing a hole for reducing the weight in a mirror to be placed on a holding board for measuring a position by a measuring light to reflect the measuring light.
SOLUTION: A mirror 1 has a hole 14 for reducing the weight and a stress releasing groove 16 formed so as to have the same sectional form in the longitudinal direction. The dead weight of the mirror 1 is supported by a three-point support seat 13 provided on an X-stage 2. In order to prevent the floating by inertial force during the movement of the stage 2, a downward pre-load is added by a presser leaf spring 12. The mirror 1 is butted by a butt member 15 fixed onto the stage 2, and the pre-load is added from the opposed surface by a spring pre-load mechanism 11. Thus, the slippage and vibration of the mirror 1 accompanying the movement of the stage 2 can be suppressed, the position measurement of the stage 2 can be precisely performed, and a highly precise positioning also can be performed.
Inventors:
Noriaki Murata
Application Number:
JP7930596A
Publication Date:
July 22, 2003
Filing Date:
March 08, 1996
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/00; G03F7/20; G03F9/00; H01L21/027; H01L21/68; (IPC1-7): G01B11/00
Domestic Patent References:
| JP7103713A | ||||
| JP3131442A | ||||
| JP56850A | ||||
| JP57146202A | ||||
| JP6300907A | ||||
| JP821905A | ||||
| JP52102U |
Attorney, Agent or Firm:
Tetsuya Ito