To provide a small and highly accurate moving stage employing an electromechanical conversion element.
An actuator 10 is constructed by coupling one end of a piezoelectric element 15 with a drive shaft 16 which is friction coupled with a slider block 12. In the moving stage 30 the actuator 10 is mounted on a base 31 and the slider block 12 is engaged, integrally in the moving direction and movably in the vertical direction, with a table 34 through a coupling pin 38. The table 34 is provided independently from the slider block 12 and supported, movably in the moving direction of slider block, by means of a linear ball bearing 32 and a slide part 33. When a saw-tooth driving pulse is applied to the piezoelectric element 15 and the drive shaft 16 is displaced in the axial direction at a different reciprocal speed, the slider block 12 moves in a predetermined direction thus moving the table 34 coupled through the coupling pin 38.
OKAMOTO YASUHIRO
ISHIBASHI KENJI
TANIJIRI YASUSHI
OKADA HIROYUKI
