マルチビーム粒子ビームシステム、及びマルチビーム粒子ビームシステムを動作させる方法

Japanese Patent JP7206380

B2

A method of operating a multi-beam particle beam system includes: generating a multiplicity of particle beams such that they each pass through multipole elements that are either intact or defective; focusing the particle beams in a predetermined plane; determining excitations for the deflection elements of the multipole elements; exciting the deflection elements of the multipole elements that are intact with the determined excitations; modifying the determined excitations for the deflection elements of the multipole elements that are defective; and exciting the deflection elements of the defective multipole elements with the modified excitations. Modifying the determined excitations includes adding corrective excitations to the determined excitations. The corrective excitations are the same for all deflection elements of the defective multipole element.

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Zydra Dirk
Riedesel Christoph
Thomas Arne
Metalidis Giorgio
Jacobi Jörg
Schubert Stephan
Renke Ralph
Beer Ulrich
Sarov Janko
Cly Georg

JP2021518111A

January 17, 2023

September 30, 2019

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Carl Zeiss Martisem Gezel Shaft Mitt Beschlenktel Haftung

H01J37/147; H01J37/153; H01J37/21

JP2010020919A
JP2009032691A
JP2004265864A
JP2018513543A

Shinichiro Tanaka
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Naoki Kondo
Takeo Nasu
Hiroshi Oura

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