Title:
【発明の名称】電子線露光方法
Document Type and Number:
Japanese Patent JP3006554
Kind Code:
B2
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Inventors:
Kenichi Tokunaga
Application Number:
JP20902997A
Publication Date:
February 07, 2000
Filing Date:
August 04, 1997
Export Citation:
Assignee:
NEC
International Classes:
G21K5/04; G03F7/20; H01J37/147; H01J37/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20; G21K5/04; H01J37/147; H01J37/20
Attorney, Agent or Firm:
Akihiko Nakazawa