Title:
【発明の名称】積層型圧電アクチュエ―タの製造方法
Document Type and Number:
Japanese Patent JP2508323
Kind Code:
B2
Abstract:
PURPOSE:To firmly and solidly couple the outer peripheral ends of inner electrode with outer electrodes formed by plating or printing process, etc., by a method wherein the manufacturing process is provided with a stage protruding parts of inner electrodes to the laminated body sides as well as another stage electrically coupling the protrusions to the same sides of the inner electrodes with the outer electrodes. CONSTITUTION:Within the whole outer peripheral region or a part thereof, laminated bodies 8 protruded further outward from the outermost sidewall position of piezoelectric elements 5 supporting inner electrodes 2 are formed. That is, the inner electrodes 2 are provided with this plate protrusions 2A slightly extending into the air not supported by piezoelectric plates 1 and having the protrusion length of 0.05 to 0.5mm and the thickness of several micron to a score and several micron in the form of a thin film. Then, the thin plate protrusions 2A are used as individual outer terminals and electrically coupled with one another alternately to enable outer electrodes 12 to be formed.
Inventors:
KOMEICHI SHIGEKI
HAYASAKA TAMIO
HAYASAKA TAMIO
Application Number:
JP32407089A
Publication Date:
June 19, 1996
Filing Date:
December 15, 1989
Export Citation:
Assignee:
TOYOTA MOTOR CO LTD
International Classes:
H01L41/083; H01L41/09; (IPC1-7): H01L41/083
Attorney, Agent or Firm:
Aoki Akira (4 outside)