Title:
【発明の名称】無機化合物薄膜の製造方法
Document Type and Number:
Japanese Patent JP3061845
Kind Code:
B2
Abstract:
PURPOSE:To obtain a uniform, smooth inorg. thin film by dropping a soln. of specified metal compd. on water, effecting the reaction of the metal compd. with water or with a compd. dissolved in the water, decreasing the area of the water surface to make a thin film and transferring the obtd. thin film on a solid substrate. CONSTITUTION:A soln. is prepared by dissolving such a metal compd. (e.g. tetraethoxysilane) in a solvent (e.g. chloroform) that gives a water-insoluble product by the reaction with water or with a compd. dissolved in water. After this soln. is dropped on water to effect the reaction of the metal compd. with water or with a compd. dissolved in the water (e.g. ammonia), the surface area of the water is reduced by Langmuir-Blodgett method to form a thin film of 0.5-50nm thickness. Then, a solid substrate maintained horizontally is calmly brought into contact with the water surface to transfer the thin film on the substrate, which is then heat-treated.
Inventors:
Katsuyuki Naito
Application Number:
JP25687490A
Publication Date:
July 10, 2000
Filing Date:
September 28, 1990
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
C01B13/14; B01J19/00; B05D1/20; C01B21/068; C01B33/12; C01F7/02; C01G1/02; C01G15/00; H01L21/314; (IPC1-7): C01B13/14; B01J19/00; B05D1/20; C01B21/068; C01B33/12; C01F7/02; C01G1/02; C01G15/00; H01L21/314
Domestic Patent References:
| JP63289721A | ||||
| JP63262478A |
Attorney, Agent or Firm:
Takehiko Suzue (3 outside)