Title:
【発明の名称】電界効果トランジスタ及びトランジスタ特性評価方法
Document Type and Number:
Japanese Patent JP3092546
Kind Code:
B2
Inventors:
Yasuo Ohno
Application Number:
JP15879297A
Publication Date:
September 25, 2000
Filing Date:
June 16, 1997
Export Citation:
Assignee:
NEC
International Classes:
G01R31/26; H01L21/66; (IPC1-7): H01L21/66; G01R31/26
Domestic Patent References:
| JP4236443A | ||||
| JP6387773A | ||||
| JP60236268A |
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)