PURPOSE: To obtain the high permeability of a soft magnetic film by a method wherein the fine crystal soft magnetic thin film is formed in a magnetic field of a proper intensity or the soft magnetic film is heat-treated in a rotating magnetic field of a proper intensity.

CONSTITUTION: A soft magnetic film is shown by a formula which is TxMyLz (The T shows at least one kind of an element chosen from among Co, Fe and Ni, the M shows at least one kind of an element chosen from among Nb, Zr, Ta, Hf, Y, Mo, W, Cr, Ti, Si, Al, B, Sn, Ga, Ge and V, the L shows at least one kind of an element of nitrogen and oxygen and the (x), the (y) and the (z) respectively show the respective ratios of the elements T, M and L at an atomic%.). The compositional range of the soft magnetic film is set on the conditions of 60≤x≤95.1, 1≤y≤20 and 2≤z≤20. Moreover, a method of manufacturing the soft magnetic film is performed by a method, wherein the formation of the fine crystal soft magnetic thin film is conducted in a magnetic field of 1kA/m or higher and 1000kA/m or lower, or by a method, wherein after the soft magnetic film is formed, a heat treatment is performed on the soft magnetic film in a rotating magnetic field of 1kA/m or higher and 1000kA/m or lower at a temperature of 300°C or higher and 700°C or lower. Thereby, the soft magnetic thin film having a high permeability is obtained.