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Title:
【考案の名称】研磨装置
Document Type and Number:
Japanese Patent JPH0724200
Kind Code:
Y2
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Inventors:
High Yoshio Yama
Application Number:
JP6503492U
Publication Date:
June 05, 1995
Filing Date:
August 25, 1992
Export Citation:
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Assignee:
High Yoshio Yama
International Classes:
B24B31/02; (IPC1-7): B24B31/02
Attorney, Agent or Firm:
Tetsuo Tachibana



 
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