Title:
VERTICAL FURNACE
Document Type and Number:
Japanese Patent JPH065532
Kind Code:
A
Abstract:
PURPOSE: To provide a vertical furnace having advantages of the steep temperature gradient being made gentle in proximity to its inlet in taking in/out such workpieces as wafers, the thermal stress to workpieces being relieved, and the furnace temperature drop due to workpieces being reduced without need for the modification of heater length.
CONSTITUTION: The furnace is a vertical furnace for heating workpieces. A preliminary furnace 1 is provided, thereby the temperature gradient at its inlet to take in/out workpieces is made gentle. The preliminary furnace 1 is positioned preferably below a shutter 2 for sealing the main furnace.
Inventors:
YANAGAWA SHUSAKU
Application Number:
JP18306792A
Publication Date:
January 14, 1994
Filing Date:
June 17, 1992
Export Citation:
Assignee:
SONY CORP
International Classes:
C30B31/12; H01L21/22; H01L21/31; (IPC1-7): H01L21/22; C30B31/12; H01L21/31
Attorney, Agent or Firm:
Toru Takatsuki
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