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Title:
RESIST COATER AND RESIST COATING METHOD
Document Type and Number:
Japanese Patent JPH0613302
Kind Code:
A
Abstract:

PURPOSE: To coat a resist in uniform thickness on the upper and lower parts of stepped sections by providing a means for applying centrifugal force horizontally from the center of board surface to its periphery on the board surface and a means for applying centrifugal force vertically to the board surface and optimizing the intensity of the two centrifugal forces and its applying time.

CONSTITUTION: A first rotating means 19 generates centrifugal force directing horizontally from the center to periphery on a board 10 and flows the applied resist 12 from upper side to lower side on a stepped section 21. A second rotating means 20 applied centrifugal force vertically on the board 10 and flows the resist 12 from lower side to upper side on the section 21. First, the resist 12 is dripped on the center of the board by means of a nozzle 14 and only the means 19 is driven to spread the resist 12 wholely on the board 10. Next, both the means 19 and 20 are simultaneously driven for a specified time. Thus, even if there are any stepped sections on the surface for coating resist, the resist can be applied in uniform thickness on upper and lower sides of the stepped sections.


Inventors:
NAGAI HIDEYASU
Application Number:
JP14168692A
Publication Date:
January 21, 1994
Filing Date:
June 02, 1992
Export Citation:
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Assignee:
SUMITOMO METAL IND
International Classes:
B05C11/08; G03F7/16; H01L21/027; (IPC1-7): H01L21/027; B05C11/08; G03F7/16
Attorney, Agent or Firm:
Ryuji Inouchi



 
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