SINGLE CRYSTAL PULLING-UP DEVICE - Shin-Etsu Semiconductor Co., Ltd.

Title:

SINGLE CRYSTAL PULLING-UP DEVICE

Document Type and Number:

Japanese Patent JP3041670

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a single crystal pulling-up device designed to address troubles due to temperature rise of an isolation valve and smooth the operation of this device, and capable of growing a high-quality single crystal.
SOLUTION: A heat screening plate 2 is mounted under an isolation valve 16 so as to operate synchronously with the opening/closing action of the opening 24 of the isolation valve 16. Thereby, the hot air from the lower chamber 13 side is prevented from coming into direct contact with the isolation valve 16.

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Inventors:

Eiichi Iino
Kiyotaka Takano
Masanori Kimura
Takashi Mizuishi
Hirotoshi Yamagishi

Application Number:

JP19108795A

Publication Date:

May 15, 2000

Filing Date:

July 04, 1995

Export Citation:

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Assignee:

Shin-Etsu Semiconductor Co., Ltd.

International Classes:

C30B15/00; C30B15/14; C30B29/06; H01L21/208; (IPC1-7): C30B15/00

Domestic Patent References:

JP4160087A

Attorney, Agent or Firm:

Chieko Tateno

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