PURPOSE: To precisely evaluated the accuracy of simulation by a measured value by calculating a third physical amount estimated based on a theory from a second physical amount of lattice point falling within a set range and by comparing a measured first physical amount with the third physical amount calculated by simulation.

CONSTITUTION: After optical beam diameter and strength of incident light 2 are set and a probe region 5 is decided, probe inspection is executed for getting a measured value thereof. Meanwhile, at the simulator side, the simulator is started and simulation result for each lattice point is obtained. Furthermore, a lattice point included in the probe region 5 of an inspection device is selected, weighting is carried out based on a positions, etc., of the selected lattice point in the probe region 5 and inspection result predicted when Raman spectroscopic inspection is executed is calculated. Thereby, the simulation can be evaluated exactly by checking stress simulation result against a measured value of a stress measurement device.