Title:
JIG FOR FIRING OF CERAMIC AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JPH0648842
Kind Code:
A
Abstract:
PURPOSE: To provide a jig for firing ceramic ensuring relatively large capacity and capable of preventing trouble such as the exfoliation of the surface layer of a ceramic sintered compact or the warp or deformation of the sintered compact by preventing a direct reaction of carbon with the jig.
CONSTITUTION: A tungsten substrate is coated with a rhenium film by chemical vapor deposition with gaseous ReF6 or gaseous ReCl6 obtd. by allowing rhenium particles to react with gaseous Cl2. Thus, the objective jig for firing of ceramic is produced.
Inventors:
TAKAOKA SHIGEHIKO
ICHIDA AKIRA
ICHIDA AKIRA
Application Number:
JP20098392A
Publication Date:
February 22, 1994
Filing Date:
July 28, 1992
Export Citation:
Assignee:
TOKYO TUNGSTEN KK
International Classes:
C04B35/64; C23C16/08; (IPC1-7): C04B35/64; C23C16/08
Attorney, Agent or Firm:
Yosuke Goto (2 outside)