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Title:
HALL ELEMENT
Document Type and Number:
Japanese Patent JPH077194
Kind Code:
A
Abstract:

PURPOSE: To suppress one characteristic of a Hall element, i.e., increase of imbalance ratio, while restraining the leak current significantly by setting the product of the carrier concentration and the thickness of a magnetosensitive layer higher than that of a buffer layer.

CONSTITUTION: A heterojunction is formed of GaInAs and AlInAs. Too thick GaInAs layer 103 causes increase of imbalance ratio which is one of the characteristics of a Hall element. Resist material is then removed only from the region for forming a pair of input electrode and output electrode 107 thus exposing the surface of the GaInAs layer 103. Silicon oxide (SiO2) is then deposited except the I/O electrode. In the novel GaInAs Hall element, the leak current is decreased by a factor of ten or more to the order of several hundreds pA to several nA when a voltage of 10V is applied between closest input terminals. Imbalance ratio is also decreased in such Hall element.


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Inventors:
UDAGAWA TAKASHI
Application Number:
JP14789493A
Publication Date:
January 10, 1995
Filing Date:
June 18, 1993
Export Citation:
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Assignee:
SHOWA DENKO KK
International Classes:
H01L43/06; (IPC1-7): H01L43/06
Attorney, Agent or Firm:
Minoru Terada