【発明の名称】プラズマド―ピング方法

Title:

【発明の名称】プラズマド―ピング方法

Document Type and Number:

Japanese Patent JP2523712

Kind Code:

B2

Inventors:

NAKAYAMA ICHIRO
MIZUNO BUNJI
KUBOTA MASABUMI

Application Number:

JP29654487A

Publication Date:

August 14, 1996

Filing Date:

November 25, 1987

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD

International Classes:

H01L21/265; H01L21/22; H01L21/302; H01L21/3065; H01L21/822; H01L27/04; (IPC1-7): H01L21/265; H01L21/22; H01L21/3065; H01L21/822; H01L27/04

Domestic Patent References:

JP62163365A
JP62163338A
JP6293955A

Attorney, Agent or Firm:

Tomoyuki Takimoto

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