Title:
Nanoparticle manufacture device
Document Type and Number:
Japanese Patent JP6009947
Kind Code:
B2
Inventors:
Hisashi Komaki
Application Number:
JP2013007066A
Publication Date:
October 19, 2016
Filing Date:
January 18, 2013
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
B01J19/08; B22F9/14
Domestic Patent References:
| JP63310599A | ||||
| JP2003213344A | ||||
| JP58112873U | ||||
| JP62194415U |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi