Title:
Negative ion source device
Document Type and Number:
Japanese Patent JP6144214
Kind Code:
B2
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Inventors:
Haruhiko Saito
Yasushi Aoki
Yasushi Aoki
Application Number:
JP2014009348A
Publication Date:
June 07, 2017
Filing Date:
January 22, 2014
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
H01J27/14; H05H7/08; H05H9/00; H05H13/00; H05H13/04
Domestic Patent References:
| JP5013016A | ||||
| JP6041044U | ||||
| JP11185648A |
Foreign References:
| US4559477 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yasuki Yanagi
Yoshiki Kuroki
Yasuki Yanagi
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