Title:
リフトオフ法用ネガ型感光性樹脂組成物及びドライフィルム
Document Type and Number:
Japanese Patent JP4047588
Kind Code:
B2
Inventors:
Tomoyuki Nishida
Application Number:
JP2002009157A
Publication Date:
February 13, 2008
Filing Date:
January 17, 2002
Export Citation:
Assignee:
Mutual Chemical Industry Co., Ltd.
International Classes:
G03F7/004; G03F7/26; C08F2/44; C08F2/50; C08F290/00; C08F291/00; G03F7/028; G03F7/029; H01L21/027; H01L21/3205; H05K3/02
Domestic Patent References:
| JP3050549A | ||||
| JP8006246A | ||||
| JP5297579A | ||||
| JP10291969A | ||||
| JP2001051415A | ||||
| JP2001264966A | ||||
| JP2001154013A |
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori
Atsuo Mori