Title:
NEGATIVE TYPE PHOTOSENSITIVE PASTE AND ITS MANUFACTURING METHOD, PATTERN FORMING METHOD AND MANUFACTURING METHOD OF PANEL FOR FLAT DISPLAY
Document Type and Number:
Japanese Patent JP2006259717
Kind Code:
A
Abstract:
To provide a negative type photosensitive paste with which thickening and meandering of the pattern and lowering of sensitivity of the photosensitive paste do not occur, and an exposure margin is surely improved, for the purpose of forming a high-precision and high aspect ratio pattern.
The negative type photosensitive paste includes at least inorganic fine particles and a photosensitive organic component, wherein an optical discoloration compound is included as the organic component. Furthermore, the pattern forming method includes drying of the negative type photosensitive paste, subsequent applying of it so as to make film thickness 150 μm or more, and at least subsequent exposing, developing and baking.
Inventors:
TANPO YOSHIHIRO
KAWABE KENICHI
KAWASAKI MANABU
SHIGETA KAZUKI
KAWABE KENICHI
KAWASAKI MANABU
SHIGETA KAZUKI
Application Number:
JP2006043507A
Publication Date:
September 28, 2006
Filing Date:
February 21, 2006
Export Citation:
Assignee:
TORAY INDUSTRIES
International Classes:
G03F7/004; G03F7/022; G03F7/038; G03F7/075; G03F7/11; G03F7/38; G03F7/40; H01J9/02; H01J11/02; H01J11/22; H01J11/34; H01J11/36
Domestic Patent References:
| JPH04329544A | 1992-11-18 | |||
| JP2006276791A | 2006-10-12 | |||
| JP2001209174A | 2001-08-03 | |||
| JP2004519827A | 2004-07-02 | |||
| JP2002072472A | 2002-03-12 | |||
| JP2002023383A | 2002-01-23 | |||
| JP2000191945A | 2000-07-11 | |||
| JPH095993A | 1997-01-10 | |||
| JP2000029212A | 2000-01-28 |