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Patent Searching and Data


Title:
NEW FLUORINE-CONTAINING UNSATURATED ALCOHOL AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP2005029540
Kind Code:
A
Abstract:

To provide a new fluorine-containing unsaturated alcohol useful e.g. as a synthetic raw material for a polysiloxane having a fluorine-containing norbornane skeleton and suitable e.g. as a resin component of a resist having high transparency to the radiation of ≤193 nm wavelength and excellent resolution, sensitivity, developability, dry-etching resistance, etc., and enabling easy control of the solubility to an alkaline developing liquid and provide a method for the production of the alcohol.

The fluorine-containing unsaturated alcohol is expressed by formula (1) (x is an integer of 0-5; and y is an integer of 1-3). The fluorine-containing unsaturated alcohol is produced by the dehydrofluorination reaction of a fluorinated alcohol expressed by formula (i).


Inventors:
CHIBA TAKASHI
Application Number:
JP2003273405A
Publication Date:
February 03, 2005
Filing Date:
July 11, 2003
Export Citation:
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Assignee:
JSR CORP
International Classes:
C07C33/42; C07C29/58; (IPC1-7): C07C33/42; C07C29/58
Attorney, Agent or Firm:
Toshiaki Fukuzawa