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Title:
窒化物単結晶の製造方法
Document Type and Number:
Japanese Patent JP4229624
Kind Code:
B2
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JP2816139INDUSTRIAL APPLICABILITY: Transfer system for vacuum processing apparatus and vacuum processing apparatus
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Inventors:
Fumio Orito
Shinichiro Kawabata
Takashi Wada
Application Number:
JP2002076167A
Publication Date:
February 25, 2009
Filing Date:
March 19, 2002
Export Citation:
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Assignee:
Mitsubishi Chemical Corporation
International Classes:
B01J3/00; C30B7/10; B01J3/04; C30B29/38
Domestic Patent References:
JP1272737A
Foreign References:
WO2001024921A1
WO2002101125A1
Other References:
R.Dwilinski, R.Doradzinski, J.Graczynski, L.Sizrzputowski, J.M.Baranowski, M.Kaminsha,AMMONO method of GaN and AlN production,DIAMOND AND RELATED MATERIALS,Elsevier,1998年,volume 7,p.1348-1350
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes



 
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