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Title:
NON CONTACT CARRIER DEVICE OF PLATE ARTICLE
Document Type and Number:
Japanese Patent JP2000191137
Kind Code:
A
Abstract:

To carry out stable non-contact carriage by restraining vibration of a plate article in carriage.

A vibration restraining plate 4 is arranged with a prescribed clearance (damper clearance S2) with one surface 1a of a plate glass 1 between plural numbers of fluid holding parts 3. Compressed air P supplied from a supply port 3a of the fluid holding part 3 flows in a prescribed clearance (holding clearance S1) between the one surface 1a of the plate glass 1 and a holding surface 3c of the fluid holding part 3, a part of the compressed air P outflowing from the holding clearance S1 flows in the damper clearance S2, and the rest is discharged outside through a ventilation passage 6. An air layer is formed in the damper clearance S2 by the compressed air P flowing in the damper clearance S2, the air layer functions as a damper against vibration of the plate glass 1 and it damps vibration of the plate glass 1 in carriage.


Inventors:
NOGUCHI NAOKI
KASHIWATANI TAKESHI
Application Number:
JP37256998A
Publication Date:
July 11, 2000
Filing Date:
December 28, 1998
Export Citation:
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Assignee:
NIPPON ELECTRIC GLASS CO
International Classes:
B65G51/03; B25J15/06; B65G49/06; H01L21/677; H01L21/68; (IPC1-7): B65G51/03; B25J15/06; B65G49/06; H01L21/68
Attorney, Agent or Firm:
Shogo Ebara (3 outside)