To carry out stable non-contact carriage by restraining vibration of a plate article in carriage.
A vibration restraining plate 4 is arranged with a prescribed clearance (damper clearance S2) with one surface 1a of a plate glass 1 between plural numbers of fluid holding parts 3. Compressed air P supplied from a supply port 3a of the fluid holding part 3 flows in a prescribed clearance (holding clearance S1) between the one surface 1a of the plate glass 1 and a holding surface 3c of the fluid holding part 3, a part of the compressed air P outflowing from the holding clearance S1 flows in the damper clearance S2, and the rest is discharged outside through a ventilation passage 6. An air layer is formed in the damper clearance S2 by the compressed air P flowing in the damper clearance S2, the air layer functions as a damper against vibration of the plate glass 1 and it damps vibration of the plate glass 1 in carriage.
KASHIWATANI TAKESHI