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Title:
NON-CONTACT TYPE DISPLACEMENT-MEASUREMENT APPARATUS
Document Type and Number:
Japanese Patent JPH0783626
Kind Code:
A
Abstract:

PURPOSE: To provide a non-contact type displacement apparatus having a simple structure capable of maintaining vertical position of a displacement meter with high accuracy.

CONSTITUTION: The apparatus is provided with a sub-reciprocating drive device 2 that moves a non-contact type displacement meter 4 in a direction perpendicular to a scanning direction (Y axis direction) and rotates the displacement meter 4 around the Y axis while it is moved in the scanning direction. The sub-reciprocating drive device 2 is horizontally supported so that the movement in the Y axis direction and rotation around the Y axis can be carried out. It comprises a main shaft 5 on which a screw groove and a spline groove are formed on a circumferential surface thereof, a ball screw nut meshed with the screw groove of the main shaft 5, a ball spline nut meshed with the spline groove of the main shaft 5 and a first driving mechanism 6 and second drive mechanism 7 each independently driving the respective nuts. The displacement meter 4 is attached to a tip section of the main shaft 5.


Inventors:
ISHIKAWA NAOYA
Application Number:
JP22993493A
Publication Date:
March 28, 1995
Filing Date:
September 16, 1993
Export Citation:
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Assignee:
SANYO ELECTRIC CO
International Classes:
G01B11/24; (IPC1-7): G01B11/24
Attorney, Agent or Firm:
Toshiyuki Maruyama (3 others)