Title:
PRODUCTION OF DIAMOND FILM AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3160399
Kind Code:
B2
Abstract:
PURPOSE: To obtain a diamond film at a low cost by arranging a diamond seed close to a substrate and in plasma, transporting a nucleus as the initial nucleus in diamond synthesis on the substrate surface and synthesizing diamond.
CONSTITUTION: A substrate 5 (powder sintered Ni) is placed on the substrate holder 10 of a microwave plasma CVD device, and a diamond powder 4 (synthetic or natural powder, single crystal, polycrystal sintered compact or thin film diamond) for supplying a nucleus as the initial nucleus is arranged to surround the substrate 5. A raw gas of methane/hydrogen =1/100, etc., is introduced from an inlet 6, plasma 7 is produced at about 40Torr by a microwave generator, synthesis is conducted at about 900°C for about 2hr, and a diamond film is produced.
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Inventors:
Takashi
Osamu Fukucho
Tomoaki Shinoda
Yuichi Yui
Osamu Fukucho
Tomoaki Shinoda
Yuichi Yui
Application Number:
JP33789992A
Publication Date:
April 25, 2001
Filing Date:
November 26, 1992
Export Citation:
Assignee:
Ogura Gem Seiki Co., Ltd.
International Classes:
C30B29/04; C23C16/26; C23C16/27; (IPC1-7): C30B29/04; C23C16/27
Domestic Patent References:
| JP6451396A | ||||
| JP60131896A | ||||
| JP5132395A |
Attorney, Agent or Firm:
Masao Yamakawa