To carry out visual inspection by securing a focusing range according to the inclined state of an object of to be inspected.
The inspection apparatus is equipped with a camera turning portion 51 which inclines a camera body 12 photographing a chip 1 and an objective lens 65 and/or the chip 1; an X table 13; a Y table 14 and a micromotion adjuster 64 which make the linear movement of the camera body 12 and the object lens 65 and/or the chip 1; and a controller 70 which controls the camera turning portion 51 and the X table 13, the Y table 14, and the micromotion adjuster 64. The camera turning portion 51, the X table 13, the Y table 14 and the micromotion adjuster 64 is controlled so as to correspond to the inclination of the chip 1 previously measured with regard to the camera body 12 and the object lens 65.
COPYRIGHT: (C)2008,JPO&INPIT
UEDA YOICHIRO
FUKAE TAKAYUKI
