Title:
基板生産ラインの稼動情報モニタリングシステム
Document Type and Number:
Japanese Patent JP7137662
Kind Code:
B2
Abstract:
An operation information monitoring system (1) for substrate production lines is provided with: a plurality of site aggregation units (2) which are provided respectively at a plurality of production sites (9), and which each aggregate operation information about substrate production lines (911, 912, 913), thereby creating site information; a plurality of information transmission units (3) which are provided to correspond respectively to the plurality of production sites, and which each transmit the site information created by the respective site aggregation unit; a total aggregation unit (4) which aggregates the site information received from the plurality of information transmission units, and creates total information, which is an aggregation of the operation information about all substrate production lines at all production sites; and an area comparison output unit (5) which divides all production sites into site groups located in different areas, determines a measure relating to operation information about each area on the basis of the site information and/or the total information, and outputs these determined measures.
Inventors:
Yukihisa Morita
Application Number:
JP2021092695A
Publication Date:
September 14, 2022
Filing Date:
June 02, 2021
Export Citation:
Assignee:
Fuji corporation
International Classes:
G06Q50/04; G05B19/418; G06Q10/00
Domestic Patent References:
| JP2010238085A | ||||
| JP2002229631A | ||||
| JP201618242A |
Attorney, Agent or Firm:
Patent Attorney Corporation Kyoritsu Patent Office
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