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Title:
OPTICAL ANALYZER AND METHOD OF SPECTROSCOPIC ANALYSIS
Document Type and Number:
Japanese Patent JP2009204559
Kind Code:
A
Abstract:

To provide an optical analyzer having a scanning electronic microscope capable of simply changing a sample, and a method of spectroscopic analysis.

The optical analyzer is provided with a sample irradiating part, a sample changing chamber, and a light detector. The sample irradiation part is provided with the scanning electronic microscope, a sample mount for mounting the sample irradiated by electron rays emitted from the scanning type microscope, and a lighting part having a minute hole for passing light emitted from the sample. The optical analyzer is provided with a sample mount moving means between the sample irradiation part and the sample changing chamber.


Inventors:
YOSHIKAWA MASANOBU
Application Number:
JP2008049432A
Publication Date:
September 10, 2009
Filing Date:
February 29, 2008
Export Citation:
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Assignee:
TORAY RES CT KK
International Classes:
G01N21/62; G01N21/64; G01N21/65; G01N23/225
Domestic Patent References:
JP2000011472A2000-01-14
JP2008249478A2008-10-16
JPH05133897A1993-05-28
JP2006329699A2006-12-07
JPS61267246A1986-11-26
JP2001076661A2001-03-23
Attorney, Agent or Firm:
Tomonori Iwami