Title:
OPTICAL ANALYZER AND METHOD OF SPECTROSCOPIC ANALYSIS
Document Type and Number:
Japanese Patent JP2009204559
Kind Code:
A
Abstract:
To provide an optical analyzer having a scanning electronic microscope capable of simply changing a sample, and a method of spectroscopic analysis.
The optical analyzer is provided with a sample irradiating part, a sample changing chamber, and a light detector. The sample irradiation part is provided with the scanning electronic microscope, a sample mount for mounting the sample irradiated by electron rays emitted from the scanning type microscope, and a lighting part having a minute hole for passing light emitted from the sample. The optical analyzer is provided with a sample mount moving means between the sample irradiation part and the sample changing chamber.
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Inventors:
YOSHIKAWA MASANOBU
Application Number:
JP2008049432A
Publication Date:
September 10, 2009
Filing Date:
February 29, 2008
Export Citation:
Assignee:
TORAY RES CT KK
International Classes:
G01N21/62; G01N21/64; G01N21/65; G01N23/225
Domestic Patent References:
JP2000011472A | 2000-01-14 | |||
JP2008249478A | 2008-10-16 | |||
JPH05133897A | 1993-05-28 | |||
JP2006329699A | 2006-12-07 | |||
JPS61267246A | 1986-11-26 | |||
JP2001076661A | 2001-03-23 |
Attorney, Agent or Firm:
Tomonori Iwami
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