OPTICAL DEVICE, LASER DEVICE AND EXPOSURE APPARATUS

Title:

OPTICAL DEVICE, LASER DEVICE AND EXPOSURE APPARATUS

Document Type and Number:

Japanese Patent JP2012145890

Kind Code:

A

Abstract:

To provide an optical device having such an excellent optical performance that, when performing a plurality of wavelength converting processes in combination with each other or when performing a wavelength converting process and a light modulating process in combination with each other, these combined processes can be performed stably with high efficiency, a laser device which stably generates laser light of a desired wavelength using the optical device, and an exposure apparatus which performs exposure by irradiating an exposed surface with light of the desired wavelength while using the optical device.

In a ferroelectric substrate 31, a spatial light modulation unit 35 is provided between a wavelength conversion unit 315 and an emission plane 311b and modulates laser light outputted from the wavelength conversion unit 315, and only 0th-order light of a specific wavelength is guided to the substrate to draw a pattern corresponding to LSI data. Furthermore, within the single ferroelectric substrate 31, the spatial light modulation unit 35 is provided together with wavelength conversion units 314 and 315.

More Like This:

WO/2014/199831	OPTICAL PATH CONVERSION ELEMENT, CONNECTION STRUCTURE FOR OPTICAL PATH CONVERSION ELEMENT, LIGHT SOURCE DEVICE, AND OPTICAL MOUNTING DEVICE
JP2011502283	Multi-element configuration wavelength conversion device and laser incorporating this
WO/1990/003055	LIGHT EMITTING DEVICE AND METHOD OF PRODUCING THE SAME

Inventors:

OKAZAKI MASAHIDE
SUHARA TOSHIAKI

Application Number:

JP2011006130A

Publication Date:

August 02, 2012

Filing Date:

January 14, 2011

Export Citation:

Click for automatic bibliography generation Help

Assignee:

DAINIPPON SCREEN MFG

International Classes:

G02F1/377; G02F1/035; G02F1/39; H01L21/027

Domestic Patent References:

JPH09297331A	1997-11-18
JPH05210135A	1993-08-20
JPH117050A	1999-01-12
JP2010152214A	2010-07-08
JP2002090785A	2002-03-27
JP2008147569A	2008-06-26
JPH09297331A	1997-11-18
JPH05210135A	1993-08-20

Attorney, Agent or Firm:

Kakusho Shoichi
Ryose Uji
Kazumasa Onishi

Previous Patent: CONDUCTIVE ROLLER AND METHOD FOR MANUFACTURING THE SAME

Next Patent: SUBSTITUTE COMPUTATION SYSTEM, METHOD, REQUEST DEVICE. COMPUTATION APPARATUS AND PROGRAM