PURPOSE: To improve modulating efficiency by forming an optical directional coupler of two layers of semiconductor layers sandwiching an insulator film.
CONSTITUTION: An InxGa1-xAsyP1-y optical waveguide layer 7 is grown to 1μm thickness, an SiO2 film 8 to 5,000 and an InxGa1-xAsyP1-x layer 9 to 1.5μm thickness, respectively, on an InP substrate 6 and a ridge part 10 is formed on the surface by etching. The propagating light is coupled via the film 8 to the layer 7 beneath said film when light is made incident on the ridge part 10 of the layer 9 on the surface having such structure. The ridge part 10 is formed in order to provide an effective refractive index distribution in a horizontal direction and to confine the propagaging light therein. Ohmic electrodes 11, 12 are then formed on the surface of the part 10 and the substrate 6 side and a bias is applied between the electrodes, by which the propagation constant of each optical waveguide is changed and the intensity of the exit light from each optical waveguide is controlled.
YOSHIKAWA AKIO