To provide a manufacturing method for an optical element forming die, by which wrinkles does not occur on a protective film and the film is not stripped.

The optical element forming die is constructed by forming the protective film 2 on a base material 1 and the protective film has a multilayer structure formed by repeating a plurality of cycles each composed of film forming and the suspension of the film forming with a fixed period. As a result, the stress caused by repeated heating and cooling of the forming die is mitigated to prevent the stripping of the film and to improve the durability of the forming die.