Title:
光加熱装置及び加熱処理方法
Document Type and Number:
Japanese Patent JP7501177
Kind Code:
B2
Abstract:
An optical heating device for heating a substrate includes:a chamber for accommodating the substrate;a pair of transmissive windows disposed on the wall of the chamber, the transmissive window facing each other for allowing light for heating to enter inside the chamber;a support member for supporting the substrate to face each of the main surfaces of the substrate and the pair of transmissive windows each other;a plurality of LED elements for emitting light toward the substrate supported by the support member;a flash lamp for emitting light toward the substrate supported by the support member; anda first lighting control unit for controlling the lighting of the flash lamp after a predetermined time has elapsed since the time of lighting the LED elements.
Inventors:
Tetsuya Kitagawa
Takafumi Mizoshiri
Yoshiaki Nakamura
Takehiko Yokomori
Keita Kanazu
Takafumi Mizoshiri
Yoshiaki Nakamura
Takehiko Yokomori
Keita Kanazu
Application Number:
JP2020118998A
Publication Date:
June 18, 2024
Filing Date:
July 10, 2020
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01L21/26; H01L21/265
Domestic Patent References:
| JP2018148129A | ||||
| JP2012524400A | ||||
| JP2002261038A | ||||
| JP2021182582A |
Attorney, Agent or Firm:
Patent Attorney Corporation Junias International Patent Office