Title:
OPTICAL MEASUREMENT SYSTEM
Document Type and Number:
Japanese Patent JP2023064699
Kind Code:
A
Abstract:
To provide an optical measurement system for measuring a sample by irradiating the sample with a light beam, and having a novel configuration that can enhance measurement accuracy.SOLUTION: An optical measurement system is provided, comprising a light source for generating a light beam, a polarizer located between the light source and a sample to restrict the polarization direction of the light beam, a detector for observing scattered light generated when the sample is irradiated with the light beam, and an analyzer located between the sample and the detector. The analyzer imparts greater attenuation to light entering an optical axis central region including a point of intersection of the light beam and the optical axis than to light entering regions other than the optical axis central region.SELECTED DRAWING: Figure 2
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Inventors:
FUKUTANI YOSHIKI
MUTAGUCHI AYAKA
NAGASAWA HIROYA
MURAKAMI NORIHIKO
NISHIDA KOJI
FURUYA TSUTOMU
KOJIMA HIROYUKI
KOGA TAKESHI
MUTAGUCHI AYAKA
NAGASAWA HIROYA
MURAKAMI NORIHIKO
NISHIDA KOJI
FURUYA TSUTOMU
KOJIMA HIROYUKI
KOGA TAKESHI
Application Number:
JP2022139055A
Publication Date:
May 11, 2023
Filing Date:
September 01, 2022
Export Citation:
Assignee:
OTSUKA DENSHI CO LTD
UNIV KYOTO
UNIV KYOTO
International Classes:
G01N21/49
Attorney, Agent or Firm:
Patent Attorney Fukami Patent Office
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