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Title:
OPTICAL MODULE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2016206425
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an optical module that is monolithic integration of a silicon optical waveguide and a quartz-based optical waveguide and its performance is not deteriorated, and its manufacturing method.SOLUTION: An optical module comprises: a lower clad layer 101 made of silicon oxide; a core 102 formed on the lower clad layer 101; an upper clad layer 103 formed on the lower clad layer 101, covering the core 102; and a protective film 104 formed covering the upper clad layer 103. The core 102 is made of one of SiO, SiONand SiN, the upper clad layer 103 is made of silicon oxide, and the protective film 104 is made of silicon nitride.SELECTED DRAWING: Figure 1

Inventors:
TSUCHIZAWA YASUSHI
OKAZAKI KOTA
NISHI HIDETAKA
YAMADA KOJI
Application Number:
JP2015088068A
Publication Date:
December 08, 2016
Filing Date:
April 23, 2015
Export Citation:
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Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G02B6/13; G02B6/12; G02B6/122
Domestic Patent References:
JPH05188227A1993-07-30
JP2012042849A2012-03-01
JP2012112984A2012-06-14
JP2011527020A2011-10-20
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Yuzo Koike



 
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