Title:
OPTICAL MULTILAYER FILM AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP2005189311
Kind Code:
A
Abstract:
To provide an optical multilayer film in which each layer can be homogenized and to provide a method for producing the film.
In the method for producing an optical multilayer film having spacer layers 30 and mirror layers 20 alternately deposited on the surface of a substrate 10, layers having predetermined thickness or larger of the spacer layers 30 are deposited in a plurality of times of film depositing steps.
Inventors:
SUZUKI MASASHI
Application Number:
JP2003427622A
Publication Date:
July 14, 2005
Filing Date:
December 24, 2003
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B5/28; C23C14/08; (IPC1-7): G02B5/28
Attorney, Agent or Firm:
Osamu Kiuchi