Title:
OPTICAL PROBE ARRAY HEAD DEVICE
Document Type and Number:
Japanese Patent JP3507881
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an optical probe array head device that dispenses with an optical lens system necessary for photodetecting and that permits positional control such as tracking for accurately copying recording mark lines, by providing a photodetector in an optical probe array and by plurally dividing the photodetector respectively.
SOLUTION: In an optical probe array 1 having plural apertures 2, a photodetector for detecting light is plurally arranged in each probe, detecting signals from a sample and recording medium simultaneously in large numbers. The photodetectors are integrated with the probe array by micro fabrication techniques and arranged in a manner surrounding the plural apertures; thus, provided in the optical probe array, using the micro fabrication techniques, are such a structure as effectively detecting weak proximity light scattering, or such a structure that carries out tracking by plurally dividing the photodetector and by signal-processing with the output signal of these divided photodetectors, or a circuit necessary for processing the signals.
Inventors:
Kuwabara, Masashi
Nakano, Takashi
Tominaga, Junji
Atoda, Nobufumi
Nakano, Takashi
Tominaga, Junji
Atoda, Nobufumi
Application Number:
JP24278399A
Publication Date:
March 15, 2004
Filing Date:
August 30, 1999
Export Citation:
Assignee:
AGENCY OF IND SCIENCE & TECHNOL
Kuwabara, Masashi
Kuwabara, Masashi
International Classes:
G01J1/04; G01J1/42; G01Q20/02; G01Q60/22; G01Q70/06; G01Q80/00; G02B21/06; G11B7/00; G11B7/13; G11B7/09; G11B7/131; G11B7/133; G11B7/135; G11B7/1387; G11B7/22; H01L31/02; H01L31/0352; H01L31/109; G11B7/095; G11B7/14; (IPC1-7): G11B7/13; G01J1/04; G01J1/42; G01N13/10; G01N13/14; G02B21/06; G11B7/09; G11B7/135; G11B7/22