OPTICAL PROCESSING DEVICE

Title:

OPTICAL PROCESSING DEVICE

Document Type and Number:

Japanese Patent JPS64958

Kind Code:

A

Abstract:

PURPOSE: To uniformize processing over the entire surface of a material to be processed and to improve processing efficiency by providing a fluid supplying part opened with plural supplying ports for supplying processing fluid to the material to be processed in a processing chamber.

CONSTITUTION: A lamp chamber 17 where a light emitting source 20 of prescribed light is positioned, the processing chamber 18 where the material 10 to be processed is positioned, and the fluid supplying part 25 opened with the plural supplying ports 27 for supplying the processing fluid 13 in the form of showers to the material 10 to be processed in the processing 18 are provided. The processing fluid 13 is, therefore, supplied in the form of the showers through the plural supplying ports 27 to the surface of the material 10 to be processed. The processing is thereby uniformized over the entire surface of the material 10 to be processed and the processing efficiency in the optical processing is improved.

Inventors:

SATO TOMOKO
OOSAKAYA TAKAYOSHI
OZAWA KUNIAKI

Application Number:

JP15547987A

Publication Date:

January 05, 1989

Filing Date:

June 24, 1987

Export Citation:

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Assignee:

HITACHI LTD
HITACHI TOKYO ELECTRONICS

International Classes:

H01L21/302; G03C11/00; G03F7/00; G03F7/42; H01L21/027; H01L21/30; H01L21/3065; (IPC1-7): G03C11/00; G03F7/00; H01L21/30; H01L21/302

Attorney, Agent or Firm:

Katsuo Ogawa

Next Patent: ELECTROPHOTOGRAPHIC SENSITIVE BODY