Title:
OPTICAL WAVEGUIDE DEVICE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3050202
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an optical waveguide device capable of further-more suppressing the generation of DC drift.
SOLUTION: Two parallel optical waveguides are formed on the main surface of a Z-cut substrate 10 consisting of LiNbO3 and the whole surface forming a damage and near to the main surface is removed by the etching of several nm depth. Then an epitaxial growth layer 24 is formed on an intermediate area 22 between both the optical waveguides 12.
Inventors:
Mitsuhiro Kitamura
Application Number:
JP10827698A
Publication Date:
June 12, 2000
Filing Date:
April 17, 1998
Export Citation:
Assignee:
NEC
International Classes:
G02F1/035; (IPC1-7): G02F1/035
Domestic Patent References:
| JP63141021A | ||||
| JP566217A | ||||
| JP6488403A | ||||
| JP63239404A |
Other References:
１９９４年電子情報通信学会春季大会講演論文集 ４．通信・エレクトロニクス（１９９４年３月１０日発行）ｐｐ．４−４４９−４−４５０
ＩＥＥＥ Ｊｏｕｒｎａｌ ｏｆ Ｑｕａｎｔｕｍ Ｅｌｅｃｔｒｏｎｉｃｓ，Ｖｏｌ．ＱＥ−２２ Ｎｏ．６ ｐｐ．９０２−９０６（Ｊｕｎｅ １９８６）Ｈ．Ｈａｇａ ｅｔ．ａｌ．，”ＬｉＮｂＯ３ ｔｒａｖｅｌｉｎｇ−ｗａｖｅ ｌｉｇｈｔ ｍｏｄｕｌａｔｏｒ／ｓｗｉｔｃｈ ｗｉｔｈ ａｎ ｅｔｃｈｅｄ ｇｒｏｏｖｅ”
Ｊｏｕｒｎａｌ ｏｆ Ｌｉｇｈｔｗａｖｅ Ｔｅｃｈｎｏｌｏｇｙ，Ｖｏｌ．６ Ｎｏ．６ ｐｐ．９０９−９１５（Ｊｕｎｅ １９８８），Ｔ．Ｆｕｊｉｗａｒａ ｅｔ．ａｌ．，”Ｓｕｐｐｒｅｓｓｉｏｎ ｏｆ ｃｒｏｓｓｔａｌｋ ｄｒｉｆｔ ｉｎ Ｔｉ：ＬｉＮｂＯ３ ｗａｖｅｇｕｉｄｅ ｓｗｉｔｃｈｅｓ”
ＩＥＥＥ Ｊｏｕｒｎａｌ ｏｆ Ｑｕａｎｔｕｍ Ｅｌｅｃｔｒｏｎｉｃｓ，Ｖｏｌ．ＱＥ−２２ Ｎｏ．６ ｐｐ．９０２−９０６（Ｊｕｎｅ １９８６）Ｈ．Ｈａｇａ ｅｔ．ａｌ．，”ＬｉＮｂＯ３ ｔｒａｖｅｌｉｎｇ−ｗａｖｅ ｌｉｇｈｔ ｍｏｄｕｌａｔｏｒ／ｓｗｉｔｃｈ ｗｉｔｈ ａｎ ｅｔｃｈｅｄ ｇｒｏｏｖｅ”
Ｊｏｕｒｎａｌ ｏｆ Ｌｉｇｈｔｗａｖｅ Ｔｅｃｈｎｏｌｏｇｙ，Ｖｏｌ．６ Ｎｏ．６ ｐｐ．９０９−９１５（Ｊｕｎｅ １９８８），Ｔ．Ｆｕｊｉｗａｒａ ｅｔ．ａｌ．，”Ｓｕｐｐｒｅｓｓｉｏｎ ｏｆ ｃｒｏｓｓｔａｌｋ ｄｒｉｆｔ ｉｎ Ｔｉ：ＬｉＮｂＯ３ ｗａｖｅｇｕｉｄｅ ｓｗｉｔｃｈｅｓ”
Attorney, Agent or Firm:
Kihei Watanabe