Title:
OPTICAL WAVEGUIDE DEVICE
Document Type and Number:
Japanese Patent JPH0442103
Kind Code:
A
Abstract:
PURPOSE:To offer the optical waveguide device equipped with a heater having superior reliability by composing a heating body of plural very small heaters and feeding leads which feed electricity to them. CONSTITUTION:A thin film heater as the heating body for adjusting the phase of an optical waveguide is divided into very thin film heaters 11a, 11b, 11c, and 11d, which are coupled electrically in parallel by the feeding leads 12a and 12b and united. The very thin film heaters 11a-11d are formed by vapor- depositing chromium metal under a vacuum and the feeding leads 12a and 12b are also formed by the vacuum deposition of chromium metal at the same time; when electric power of 0.3W in total is supplied through electric wiring pads 5a and 5b, namely, when electric power of 0.1W is fed to each very thin film heater, the optical waveguide can have an increase in optical waveguide length to 0.75 mum is made. Even if one of the four very small heaters breaks, the remaining heaters can maintain the functions of phase adjustment sufficiently and two very small heaters rarely come to defective in the optical waveguide which has this phase adjustment part, so that the reliability of the optical waveguide device is improved greatly.
Inventors:
KAWACHI MASAO
INOUE YASUYUKI
SUGITA AKIO
ONOSE KATSUHIDE
INOUE YASUYUKI
SUGITA AKIO
ONOSE KATSUHIDE
Application Number:
JP14854890A
Publication Date:
February 12, 1992
Filing Date:
June 08, 1990
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G01B9/02; G02B6/12; G02B6/122; G02F1/01; (IPC1-7): G01B9/02; G02B6/12
Attorney, Agent or Firm:
Yoshikazu Tani
Next Patent: JPH0442104