Title:
OPTICAL WAVEGUIDE PASSAGE SENSOR
Document Type and Number:
Japanese Patent JPH04329311
Kind Code:
A
Abstract:
PURPOSE:To provide a displacement measuring sensor with high productivity, a simple mechnism, and small size and light weight by making a substrate partially thin to form a chamber, and providing a lens function, through a process of utilizing a displacement in a vertical direction to an optical waveguide passage facing to the chamber. CONSTITUTION:A slab type optical waveguide passage 23 is formed on a buffer layer 22 positioned on a substrate 21. A chamber 21a to leave the substrate surface side thinly is formed on the back surface of the substrate 21, and by that chamber a diaphragm part 24 is constituted. A light detector 25 receives outgoing light 26 which is propagated through the optical waveguide passage 23 passage and passes through a diaphragm part 24. A light source 28 which emits waveguide light 27 is installed on the end surface of the substrate 21, and ahead of it, a collimate lens 29 is installed. When the diaphragm part 24 is displaced by a pressure difference between its upper and lower parts, it owns its function to equivalent a that of a geodosic lens, by which the light quantity distribution of outgoing light 26 changes in response to the displacement of the diaphragm part 24. By measuring the change in photo distribution incident on a photo detector 25, the displacement of the diaphragm part 24 is detected.
Inventors:
FUNAZAKI JUN
Application Number:
JP10018491A
Publication Date:
November 18, 1992
Filing Date:
May 01, 1991
Export Citation:
Assignee:
OLYMPUS OPTICAL CO
International Classes:
G01D5/353; G01D5/26; G01L9/00; G02B6/12; G02B6/122; G11B7/13; (IPC1-7): G01D5/26; G01L9/00; G02B6/12; G11B7/13
Attorney, Agent or Firm:
Takehiko Suzue